НОВЫЕ РЕЗУЛЬТАТЫ исследований причин прироста твердости в наноструктурных покрытиях нестехиометрического кубического нитрида титана

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  • 621.793.7

    .. , . . .,

    -

    . TiNy -. . ( > 40 ), - Ti3N2 Ti6N5.

    : , , , , .

    .. , . . ., -

    . - TiNy . - . - ( > 40 ), Ti3N2 Ti6N5. : , , , , .

    NEW DATA CONCERNING CAUSES OF HARDNESS INCREASE

    IN NANOSTRUCTURED COATINGS OF NON-STOICHIOMETRIC CUBIC TITANUM NITRIDE

    V. Shulayev, senior researcher, National Science Center

    Kharkv Institute of Physics and Technology

    Abstract. The non-stoichiometric coatings of the cubic titanium nitride TiNy were synthesized in its homogeneous area by one-directed growth through the plasma-solid mechanism. The coating hard-ness was measured depending on the nitrogen pressure during the synthesis process. At certain pro-portion of nitrogen and structural vacations two super-hard states (H > 40 GPa) appeared in non-me5tal sub-lattice. They correspond to the ordered low-tempera5ture Ti3N2 and Ti6N5 phases. Key words: titanium nitride, non-stoichiometry, super-hardness, coatings, equipment Bulat.

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    , . 51, 2010 133

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    1. Sue J. A. Development of arc evaporation of

    non-stoichiometric titanium nitride coat-ings / J. A. Sue // Surface and Coating Technology. 1993. Vol. 61, 1. P. 115120.

    2. . / . . . : , 1974. 294 .

    3. .. - / .. // . 2000. . 170, 1. . 340.

    4. Rafael R. Manory X-ray characterization of TiNx films with CaF2-type structure / Rafael R. Manory, G. Kimmel // Thin Solid Films. 1987. Vol. 150. . 277282.

    5. .. , , / .. . . : , 2007. 856 .

    6. .. - - : / .. -, .. , .. , .. -. : , 2005. 236 .

    7. .. - - -6 : - 1984-1985 . / .. , .. , .. . . : -, 1985. . 518.

    8. .. - , -- - / .. , .. , .. - // -. 2007. 4 (13). . 1516.

    9. .. - / .. , .. , .. -, .. // c. . - -. . 2007. . 1. . 5255.

    10. .. Ti-Si-N-, - . / .. , .. , .. . 2007. .1. . 1923.

    : .. , , ..., . 26 2010 .

    , . 51, 2010

    134

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