真空泵浦與真空系統 - 爆炸危險 備註:Edwards 泵浦

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<ul><li><p>P400-40-894E </p></li><li><p> Edwards Limited 2016 iEdwards Edwards Edwards Limited </p><p>P400-40-894 E </p><p>1 ................................................................................................. 1</p><p>1.1 ............................................................................................................. 11.2 ................................................................................................................... 1</p><p>2 ......................................................................................... 3</p><p>2.1 ........................................................................................................................ 32.2 ........................................................................................................................ 32.3 / ............................................................................................................. 32.4 / ............................................................................................................... 4</p><p>3 ......................................................................................... 5</p><p>3.1 .......................................................................................................... 53.1.1 ................................................................................................................... 53.1.2 ................................................................................................................ 53.2 ............................................................................................................. 53.3 ................................................................................................................... 63.3.1 ..................................................................................................................... 63.3.2 / ....................................................................................................... 73.3.3 ................................................................................................................... 73.3.4 ................................................................................................................... 83.4 ........................................................................................................ 83.4.1 ................................................................................................................... 83.4.2 ................................................................................................................ 93.5 ...................................................................................................... 9</p><p>4 ....................................................................................... 11</p><p>4.1 .........................................................................................................114.2 ............................................................................................................114.3 ............................................................................................................124.4 ..................................................................................................................124.4.1 ....................................................................................................124.4.2 ....................................................................................................124.5 .....................................................................................................13</p><p>5 ......................................................................................... 15</p><p>6 ......................................................................................... 17</p><p>6.1 .......................................................................................................176.2 ............................................................................................................176.3 ........................................................................................................186.4 .................................................................................186.5 ...............................................................................................................196.6 ...............................................................................................................216.7 ....................................................................................................216.8 ....................................................................................................................226.9 ........................................................................................................23</p><p>7 ................................................................................. 25</p><p>7.1 .................................................................................................267.2 Edwards .......................................................................................................26</p><p>Xpla</p><p>nati</p><p>on 1</p><p>4326</p><p> 06/</p><p>2016</p></li><li><p>P400-40-894 E </p><p> ii Edwards Limited 2016 Edwards Edwards Edwards Limited </p><p>7.3 ..................................................................................................................267.3.1 ....................................................................................................................267.3.2 .......................................................................................................................267.3.3 ....................................................................................................................277.3.4 .......................................................................................................................277.4 ............................................................................................................277.4.1 .......................................................................................................................277.4.2 .........................................................................................................277.4.3 ...............................................................................................................277.4.4 ....................................................................................................................277.5 ..................................................................................................................287.6 .................................................................................................28</p><p>8 ................................................................................. 29</p><p>9 ............................................................................................... 31</p><p>Edwards Ltd Edwards Ltd Edwards / </p></li><li><p> Edwards Limited 2016 1Edwards Edwards Edwards Limited </p><p>P400-40-894 E </p><p>1 1.1 </p><p> Edwards Edwards </p><p>1.2 </p><p> Edwards ATEX </p><p> 6.5 </p><p> PFPE 30 % v/v </p><p> Edwards </p></li><li><p>P400-40-894 E </p><p> 2 Edwards Limited 2016 Edwards Edwards Edwards Limited </p></li><li><p> Edwards Limited 2016 3Edwards Edwards Edwards Limited </p><p>P400-40-894 E </p><p>2 </p><p> / </p><p> / </p><p> / </p><p>2.1 </p><p>2.2 </p><p> / </p><p>2.3 / </p><p> Edwards </p></li><li><p>P400-40-894 E </p><p> 4 Edwards Limited 2016 Edwards Edwards Edwards Limited </p><p>2.4 / </p><p>ATEX </p></li><li><p> Edwards Limited 2016 5Edwards Edwards Edwards Limited </p><p>P400-40-894 E </p><p>3 3.1 </p><p>3.1.1 </p><p> (SiH4) (O2) </p><p>3.1.2 </p><p>3.2 </p><p> 1 x 10-3 mbar l s-1 (1 x 10-1 Pa l s-1) 1 x 10-5 mbar l s-1 (1 x 10-3 Pa l s-1) </p></li><li><p>P400-40-894 E </p><p> 6 Edwards Limited 2016 Edwards Edwards Edwards Limited </p><p>3.3 </p><p> / </p><p> / </p><p>3.3.1 </p><p> (O2) (O3) (F2) (NF3) (WF6) </p><p> 25 % PFPE </p><p> 25% 25 % PFPE </p><p> PFPE </p><p> PFPE </p><p> 290 C PFPE 260 C</p><p> PFPE </p><p> Edwards 7.2Edwards </p></li><li><p> Edwards Limited 2016 7Edwards Edwards Edwards Limited </p><p>P400-40-894 E </p><p>3.3.2 / </p><p> (H2) (C2H2) (C3H8) 6.8 </p><p> 6.5 </p><p> 6.8 </p><p> 6.7 </p><p>ATEX </p><p> Edwards </p><p>3.3.3 </p><p> (SiH4) (PH3) </p><p> ( ) </p><p>PFPE Edwards </p></li><li><p>P400-40-894 E </p><p> 8 Edwards Limited 2016 Edwards Edwards Edwards Limited </p><p>3.3.4 </p><p>3.4 </p><p>3.4.1 </p><p> Edwards &lt; 1 x 10-3 mbar l s-1 (&lt; 1 x 10-1 Pa l s-1) </p><p> Edwards 7.4.3 </p><p> Edwards ( EH EM ) ( ) ( )</p><p> Edwards EDP </p><p> Edwards HS1 HS2 </p><p> / ( )</p></li><li><p> Edwards Limited 2016 9Edwards Edwards Edwards Limited </p><p>P400-40-894 E </p><p>3.4.2 </p><p> Edwards </p><p>3.5 </p><p> ATEX Edwards ATEX </p></li><li><p>P400-40-894 E </p><p> 10 Edwards Limited 2016 Edwards Edwards Edwards Limited </p></li><li><p> Edwards Limited 2016 11Edwards Edwards Edwards Limited </p><p>P400-40-894 E </p><p>4 4.1 </p><p>4.2 </p></li><li><p>P400-40-894 E </p><p> 12 Edwards Limited 2016 Edwards Edwards Edwards Limited </p><p>4.3 </p><p>4.4 </p><p>4.4.1 </p><p>4.4.2 </p></li><li><p> Edwards Limited 2016 13Edwards Edwards Edwards Limited </p><p>P400-40-894 E </p><p>4.5 </p></li><li><p>P400-40-894 E </p><p> 14 Edwards Limited 2016 Edwards Edwards Edwards Limited </p></li><li><p> Edwards Limited 2016 15Edwards Edwards Edwards Limited </p><p>P400-40-894 E </p><p>5 </p><p> HAZOP </p></li><li><p>P400-40-894 E </p><p> 16 Edwards Limited 2016 Edwards Edwards Edwards Limited </p></li><li><p> Edwards Limited 2016 17Edwards Edwards Edwards Limited </p><p>P400-40-894 E </p><p>6 6.1 </p><p> 4 </p><p>6.2 </p></li><li><p>P400-40-894 E </p><p> 18 Edwards Limited 2016 Edwards Edwards Edwards Limited </p><p>6.3 </p><p>6.4 </p><p> Edwards Edwards </p><p> ATEX </p></li><li><p> Edwards Limited 2016 19Edwards Edwards Edwards Limited </p><p>P400-40-894 E </p><p>6.5 </p><p>LFL LELUFL UEL</p><p>MOC LOC MOC (LOC) 5 % vol. </p><p> LFL (LEL) </p><p> LFL (LEL) </p><p> LFL (LEL) 25 %</p><p> LFL (LEL) </p><p> MOC (LOC) </p><p> MOC (LOC) MOC (LOC) 2 % vol MOC (LOC) 5 % MOC (LOC) 60% MOC (LOC) 5 % MOC (LOC) 60 % MOC (LOC) 40% </p><p> MOC (LOC) </p><p> UFL (UEL) </p><p> UFL (UEL) UFL (UEL) 60 % UFL (UEL) </p></li><li><p>P400-40-894 E </p><p> 20 Edwards Limited 2016 Edwards Edwards Edwards Limited </p></li><li><p> Edwards Limited 2016 21Edwards Edwards Edwards Limited </p><p>P400-40-894 E </p><p>6.6 </p><p> ATEX 0 &gt;50 %</p><p> ATEX 1 </p><p> ATEX 2 </p><p>6.7 </p><p> 0 6.5 6.8 7.4.4 Edwards </p><p> Edwards 0 ATEX </p></li><li><p>P400-40-894 E </p><p> 22 Edwards Limited 2016 Edwards Edwards Edwards Limited </p><p>6.8 </p><p> Edwards </p><p> Edwards </p><p> Edwards </p><p> Edwards </p><p> 3.3.3</p></li><li><p> Edwards Limited 2016 23Edwards Edwards Edwards Limited </p><p>P400-40-894 E </p><p>6.9 </p><p> PFPE </p><p> Edwards </p></li><li><p>P400-40-894 E </p><p> 24 Edwards Limited 2016 Edwards Edwards Edwards Limited </p></li><li><p> Edwards Limited 2016 25Edwards Edwards Edwards Limited </p><p>P400-40-894 E </p><p>7 Edwards Edwards </p><p> 0.15 1.15 x 105 Pa 0.15 1.15 x 105 Pa </p></li><li><p>P400-40-894 E </p><p> 26 Edwards Limited 2016 Edwards Edwards Edwards Limited </p><p>7.1 </p><p>Edwards E1ME2M RV Stokes Microvac </p><p> O Edwards </p><p> Edwards </p><p>7.2 Edwards </p><p>Edwards Edwards </p><p>Edwards </p><p>7.3 </p><p>7.3.1 </p><p> 7.3.2</p><p>7.3.2 </p></li><li><p> Edwards Limited 2016 27Edwards Edwards Edwards Limited </p><p>P400-40-894 E </p><p>7.3.3 </p><p>7.3.4 </p><p>7.4 </p><p>7.4.1 </p><p>7.4.2 </p><p>Edwards </p><p>7.4.3 </p><p>7.4.4 </p><p> 6.7</p><p> Edwards ATEX </p><p> Edwards T Edwards </p></li><li><p>P400-40-894 E </p><p> 28 Edwards Limited 2016 Edwards Edwards Edwards Limited </p><p>7.5 </p><p>7.6 </p></li><li><p> Edwards Limited 2016 29Edwards Edwards Edwards Limited </p><p>P400-40-894 E </p><p>8 </p><p> Edwards </p></li><li><p>P400-40-894 E </p><p> 30 Edwards Limited 2016 Edwards Edwards Edwards Limited </p></li><li><p> Edwards Limited 2016 31Edwards Edwards Edwards Limited </p><p>P400-40-894 E </p><p>9 </p><p> PFPE </p></li><li><p>P400-40-894 E </p><p> 32 Edwards Limited 2016 Edwards Edwards Edwards Limited </p><p>1 1.1 1.2 </p><p>2 2.1 2.2 2.3 / 2.4 / </p><p>3 3.1 3.1.1 3.1.2 </p><p>3.2 3.3 3.3.1 3.3.2 / 3.3.3 3.3.4 </p><p>3.4 3.4.1 3.4.2 </p><p>3.5 </p><p>4 4.1 4.2 4.3 4.4 4.4.1 4.4.2 </p><p>4.5 </p><p>5 6 6.1 6.2 6.3 6.4 6.5 6.6 6.7 6.8 6.9 </p><p>7 7.1 7.2 Edwards 7.3 7.3.1 7.3.2 7.3.3 7.3.4 </p><p>7.4 7.4.1 7.4.2 7.4.3 7.4.4 </p><p>7.5 7.6 </p><p>8 9 </p></li></ul>