真空泵浦與真空系統 - 爆炸危險 備註:Edwards 泵浦

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  • P400-40-894E

  • Edwards Limited 2016 iEdwards Edwards Edwards Limited

    P400-40-894 E

    1 ................................................................................................. 1

    1.1 ............................................................................................................. 11.2 ................................................................................................................... 1

    2 ......................................................................................... 3

    2.1 ........................................................................................................................ 32.2 ........................................................................................................................ 32.3 / ............................................................................................................. 32.4 / ............................................................................................................... 4

    3 ......................................................................................... 5

    3.1 .......................................................................................................... 53.1.1 ................................................................................................................... 53.1.2 ................................................................................................................ 53.2 ............................................................................................................. 53.3 ................................................................................................................... 63.3.1 ..................................................................................................................... 63.3.2 / ....................................................................................................... 73.3.3 ................................................................................................................... 73.3.4 ................................................................................................................... 83.4 ........................................................................................................ 83.4.1 ................................................................................................................... 83.4.2 ................................................................................................................ 93.5 ...................................................................................................... 9

    4 ....................................................................................... 11

    4.1 .........................................................................................................114.2 ............................................................................................................114.3 ............................................................................................................124.4 ..................................................................................................................124.4.1 ....................................................................................................124.4.2 ....................................................................................................124.5 .....................................................................................................13

    5 ......................................................................................... 15

    6 ......................................................................................... 17

    6.1 .......................................................................................................176.2 ............................................................................................................176.3 ........................................................................................................186.4 .................................................................................186.5 ...............................................................................................................196.6 ...............................................................................................................216.7 ....................................................................................................216.8 ....................................................................................................................226.9 ........................................................................................................23

    7 ................................................................................. 25

    7.1 .................................................................................................267.2 Edwards .......................................................................................................26

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    ii Edwards Limited 2016 Edwards Edwards Edwards Limited

    7.3 ..................................................................................................................267.3.1 ....................................................................................................................267.3.2 .......................................................................................................................267.3.3 ....................................................................................................................277.3.4 .......................................................................................................................277.4 ............................................................................................................277.4.1 .......................................................................................................................277.4.2 .........................................................................................................277.4.3 ...............................................................................................................277.4.4 ....................................................................................................................277.5 ..................................................................................................................287.6 .................................................................................................28

    8 ................................................................................. 29

    9 ............................................................................................... 31

    Edwards Ltd Edwards Ltd Edwards /

  • Edwards Limited 2016 1Edwards Edwards Edwards Limited

    P400-40-894 E

    1 1.1

    Edwards Edwards

    1.2

    Edwards ATEX

    6.5

    PFPE 30 % v/v

    Edwards

  • P400-40-894 E

    2 Edwards Limited 2016 Edwards Edwards Edwards Limited

  • Edwards Limited 2016 3Edwards Edwards Edwards Limited

    P400-40-894 E

    2

    /

    /

    /

    2.1

    2.2

    /

    2.3 /

    Edwards

  • P400-40-894 E

    4 Edwards Limited 2016 Edwards Edwards Edwards Limited

    2.4 /

    ATEX

  • Edwards Limited 2016 5Edwards Edwards Edwards Limited

    P400-40-894 E

    3 3.1

    3.1.1

    (SiH4) (O2)

    3.1.2

    3.2

    1 x 10-3 mbar l s-1 (1 x 10-1 Pa l s-1) 1 x 10-5 mbar l s-1 (1 x 10-3 Pa l s-1)

  • P400-40-894 E

    6 Edwards Limited 2016 Edwards Edwards Edwards Limited

    3.3

    /

    /

    3.3.1

    (O2) (O3) (F2) (NF3) (WF6)

    25 % PFPE

    25% 25 % PFPE

    PFPE

    PFPE

    290 C PFPE 260 C

    PFPE

    Edwards 7.2Edwards

  • Edwards Limited 2016 7Edwards Edwards Edwards Limited

    P400-40-894 E

    3.3.2 /

    (H2) (C2H2) (C3H8) 6.8

    6.5

    6.8

    6.7

    ATEX

    Edwards

    3.3.3

    (SiH4) (PH3)

    ( )

    PFPE Edwards

  • P400-40-894 E

    8 Edwards Limited 2016 Edwards Edwards Edwards Limited

    3.3.4

    3.4

    3.4.1

    Edwards < 1 x 10-3 mbar l s-1 (< 1 x 10-1 Pa l s-1)

    Edwards 7.4.3

    Edwards ( EH EM ) ( ) ( )

    Edwards EDP

    Edwards HS1 HS2

    / ( )

  • Edwards Limited 2016 9Edwards Edwards Edwards Limited

    P400-40-894 E

    3.4.2

    Edwards

    3.5

    ATEX Edwards ATEX

  • P400-40-894 E

    10 Edwards Limited 2016 Edwards Edwards Edwards Limited

  • Edwards Limited 2016 11Edwards Edwards Edwards Limited

    P400-40-894 E

    4 4.1

    4.2

  • P400-40-894 E

    12 Edwards Limited 2016 Edwards Edwards Edwards Limited

    4.3

    4.4

    4.4.1

    4.4.2

  • Edwards Limited 2016 13Edwards Edwards Edwards Limited

    P400-40-894 E

    4.5

  • P400-40-894 E

    14 Edwards Limited 2016 Edwards Edwards Edwards Limited

  • Edwards Limited 2016 15Edwards Edwards Edwards Limited

    P400-40-894 E

    5

    HAZOP

  • P400-40-894 E

    16 Edwards Limited 2016 Edwards Edwards Edwards Limited

  • Edwards Limited 2016 17Edwards Edwards Edwards Limited

    P400-40-894 E

    6 6.1

    4

    6.2

  • P400-40-8

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