Electronic Instruments Chap. 5 - AFM Schechner (c)1 מכשור אלקטרוני פרק 5: Atomic Force Microscope 1מטרה 2תיאורסכמתי טבלת מכלולים 3עקרון הפעולהפעולה מכנית.

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    22-Dec-2015

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  • Slide 1
  • Electronic Instruments Chap. 5 - AFM Schechner (c)1 5: Atomic Force Microscope 1 2 3 Van der Waals 4"" 5-Tip 6 2/2 -4/4 7 8 AFM -SEM
  • Slide 2
  • Electronic Instruments Chap. 5 - AFM Schechner (c)2 : : 2 1 3 4 56 7 8 9 CRT
  • Slide 3
  • Electronic Instruments Chap. 5 - AFM Schechner (c)3 / # 1 2 3 Y 4 X 5 6 7 8 grid 9
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  • Electronic Instruments Chap. 5 - AFM Schechner (c)4 : : 2 1 3 4 5 6 7 8 9
  • Slide 5
  • Electronic Instruments Chap. 5 - AFM Schechner (c)5
  • Slide 6
  • Electronic Instruments Chap. 5 - AFM Schechner (c)6 TEM -TEM -SEM Rayleigh
  • Slide 7
  • Electronic Instruments Chap. 5 - AFM Schechner (c)7 SEM
  • Slide 8
  • Electronic Instruments Chap. 5 - AFM Schechner (c)8 Electron beam lithography (EBL)
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  • Electronic Instruments Chap. 5 - AFM Schechner (c)9 http://www.cnf.cornell.edu/cnf_spie54.html Electron beam lithography (EBL) - Schematic of the JEOL JBX-5DII system
  • Slide 10
  • Electronic Instruments Chap. 5 - AFM Schechner (c)10 10 pm D A = 10 -11 m Radius [10 -10 m]Element AtomicCovalent 0.790.32Hydrogen 0.910.77Carbon 1.461.11Silicon 0.970.99Chlorine 1.761.49Mercury 100 pm = 1 ngstrmngstrm AFM
  • Slide 11
  • Electronic Instruments Chap. 5 - AFM Schechner (c)11 2.1- 3-3- 4 - 1 - 5 - 6.1 6.2 Buffer Solution 2.2 -Tip 9 Control Unit 7 Control Unit
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  • Electronic Instruments Chap. 5 - AFM Schechner (c)12 http://upload.wikimedia.org/wikipedia/en/1/1a/Atomic_force_microscope_block_diagram.png
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  • Electronic Instruments Chap. 5 - AFM Schechner (c)13 Semiconductor devices, Biological Tissues, Minerals, Polymers Sample1 Cantilever2.1 Tip2.2 Illuminates the cantileverLaser3 Detects the Reflection AngleDetector4 Moves sample on xyz directionsPiezotube5 For biological purposes only. ATM doesnt need vacuum. Works also with water Fluid Cell 6.1 Buffer Solution 6.2 Maintains the sample a the proper height Control Unit 7
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  • Electronic Instruments Chap. 5 - AFM Schechner (c)14 Novascan Technologies Atomic Force Microscopy - Atomic Force Microscopes AFMs Tips Probes UV-Ozone Cleaners.htm
  • Slide 15
  • Electronic Instruments Chap. 5 - AFM Schechner (c)15 -cantilever Van der Waals Debye Interaction London Keesom : () Multipoles ""
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  • Electronic Instruments Chap. 5 - AFM Schechner (c)16 +Z +Z +Z ,
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  • Electronic Instruments Chap. 5 - AFM Schechner (c)17 +Z . +Z +Z
  • Slide 18
  • Electronic Instruments Chap. 5 - AFM Schechner (c)18 +Z . +Z +Z
  • Slide 19
  • Electronic Instruments Chap. 5 - AFM Schechner (c)19 : +Z EgEg : EgEg -Tip - Tip
  • Slide 20
  • Electronic Instruments Chap. 5 - AFM Schechner (c)20 ? +Z "" . , , . " -"
  • Slide 21
  • Electronic Instruments Chap. 5 - AFM Schechner (c)21 : F N = F A + F R F A = Attractive Force F R = Repulsive Force :
  • Slide 22
  • Electronic Instruments Chap. 5 - AFM Schechner (c)22 r, A 0 E0E0 FAFA FRFR Potential Energy Repulsion Attraction 0 (, , ) r0r0 FNFN
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  • Electronic Instruments Chap. 5 - AFM Schechner (c)23 Van der Waals Lennard Jones where: is the well depth is the hard sphere radius. = repulsive forces = attraction forces Interaction energy of argon dimerargondimer :
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  • Electronic Instruments Chap. 5 - AFM Schechner (c)24 http://www.nanoscience.com/education/AFM.html
  • Slide 25
  • Electronic Instruments Chap. 5 - AFM Schechner (c)25 Cantilever ( , ) Tip Photo-montage http://atomicforce.de/Olympus_Cantilevers/Tip_Properties/tip_properties.html -tip . . k ~ 0.1N/m L ~ 100 m
  • Slide 26
  • Electronic Instruments Chap. 5 - AFM Schechner (c)26 Cantilever propertiesName Res. freq. (kHz) Spring const. (N/m) Thickness (um) ShapeOMCL - 160152 rectangular HA100WS 17, 17, 64, 660.06, 0.11, 0.42, 0.82 0.8 rectangular RC800PB 18, 19, 69, 710.05, 0.10, 0.39, 0.76RC800PSA 10, 320.02, 0.09 0.4 triangular TR400PB 11, 340.02, 0.08TR400PSA 22, 680.16, 0.61 0.8 TR800PB 24, 730.15, 0.57TR800PSA http://atomicforce.de/Olympus_Cantilevers/olympus_cantilevers.html
  • Slide 27
  • Electronic Instruments Chap. 5 - AFM Schechner (c)27 Tips Figure 4. Three common types of AFM tip. Electron micrographs by Jean-Paul Revel, Caltech. Tips from Park Scientific Instruments; supertip made by Jean-Paul Revel. (a)normal tip (3 m tall) ~30 nm end radius (b) supertip; (c) Ultralever (also 3 m tall) ~10 nm end radius. - Silicon nitride Si 3 N 4
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  • Electronic Instruments Chap. 5 - AFM Schechner (c)28 Van der Walls
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  • Electronic Instruments Chap. 5 - AFM Schechner (c)29 Tip propertiesName radius (nm) height ( m) shapeOMCL -

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